Study of Structural and Optical Properties of ZnO Films Prepared by Thermal Oxidation of Sputtered Zn Films
Abstract
In this work, ZnO films were prepared by thermal oxidation of sputtered Zn films. Influences of oxidation temperature and thickness of Zn films on nanostructure, including crystal structure and surface morphology of ZnO films were investigated. The crystal structure, surface morphology, and optical transmittance of ZnO films were studied via X-ray diffraction (XRD), field emission scanning electron microscopy (FE-SEM), and UV-Vis spectrophotometer, respectively. It is clearly seen that the changing of nanostructure and crystal structure of ZnO films depended on the oxidation temperature. Surface morphology of ZnO films changed from nanoflakes to nanosphere with increasing the oxidation temperature from 200°C to 400°C. Furthermore, nanopore is enhanced when increasing the thickness of Zn films at oxidation temperature of 800°C. Changing of nanostructured ZnO films from the oxidation temperature is described with growth mechanism from vapor-liquid-solid (VLS) process. Moreover, optical transmittance of ZnO films exhibited transparence at oxidation temperature of 300°C and above. Finally, nanostructured ZnO films are tested for surface of hydrophobic property which showed the highest water contact angle at 133.1° for oxidation temperature of 800°C and 500 nm thick of Zn film. Keywords : ZnO films ; nanostructure ; thermal oxidation ; oxidation temperatureReferences
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1494–1499.
Ahn, M.-W., Park, K.-S., Heo, J.-H., Park, J.-G., Kim, D.-W., Choi, K. J., Lee, J.-H. & Hong, S.-H. (2008). Gas sensing properties of defect-controlled ZnO-nanowire gas sensor. Appl. Phys. Lett., 93, 263103.
Flores-Garci´a, E., Gonza´ Lez-Garci´a P., Gonza´ Lez-Herna´ndez, J. & Rami´rez-Bon, R. (2018). Statistical Analysis of Sputter Parameters on the Properties of ZnO Thin Films Deposited by RF Sputtering.
J. of Elec. Mat., 47(9), 5537-5547.
He Y., Yanagida T., Nagashima K., Zhuge F., Meng G., Xu B., Klamchuen A., Rahong S., Kanai M., Li X., Suzuki M., Kai S., & Kawai T. (2013). Crystal-plane dependence of critical concentration for nucleation on hydrothermal ZnO nanowires. J. Phys. Chem., 117(2), 1197–1203.
Khanlary, M. R., Vahedi, V. & Reyhani, A. (2012). Synthesis and Characterization of ZnO Nanowires by Thermal Oxidation of Zn Thin Films at Various Temperatures. Molecules, 17, 5021-5029.
Katayama, J., Ito, K., Matsuoka, M. & Tamaki, J. (2004). Performance of Cu2O/ZnO Solar Cell Prepared by Two-Step Electrodeposition. Journal of Applied Electrochemistry, 34, 687-692.
Kim M.S., Yim K.G., Choi H.Y., Cho M.Y., Kim G.S., Jeon S.M., Lee D.-Y., Kim J.S., Kim J.S., Son J.-S., Lee J.L., & Leem J.-Y. (2011). Thermal annealing effects of MBE-seed-layers on properties of ZnO nanorods grown by hydrothermal method. J. Cryst. Growth., 326(1), 195-199.
Li, Z.W., Gao, W. & Reeves, R. J. (2005). Zinc oxide films by thermal oxidation of zinc thin films. Surface & Coatings Technology, 198, 319– 323.
Polsongkram D., Chamninok P., Pukird S., Chow L., Lupan O., Chai G. & Schulte A. (2008). Effect of synthesis conditions on the growth of ZnO nanorods via hydrothermal method. Physica B: Condensed Matter., 403(19-20), 3713-3717.
Sheini, F. J., Joag, D. S. & More. M. A. (2011). Patterned Growth of ZnO Nanowire Arrays on Zinc Foil by Thermal Oxidation. International Scholarly and Scientific Research & Innovation, 5(2), 109-113.
Seveno, D., Blake, T. D. & Coninck J. D. (2013). Young’s Equation at the Nanoscale, Phys. Rev. Lett., PRL 111, 096101.
Tian, C., Zhang, Q., Wu, A., Jiang, M., Liang, Z., Jiang, B. & Fu, H. (2012). Cost-effective Large-scale Synthesis of ZnO Photocatalyst with Excellent Performance for Dye Photodegradation. Chem. Commun., 48,
2858-2860.
Wahab, H.A., Salama, A.A., El-Saeid, A.A., Nur, O., Willander, M. & Battisha, I.K. (2013) Optical, structural and morphological studies of (ZnO) nano-rod thin films for biosensor applications using sol gel technique. Results in Physics., 3, 46–51.
Wang, H., Ma, Q., Nui, H., Mao, X., Wan, L., Xu, J. & Miao, S. (2013). Hydrothermal Growth of Aligned ZnO Nanorods along the Seeds Prepared by Magnetron Sputtering and its Applications in Quantum Dots Sensitized Photovoltaic Cells. Journal Nanomater. Mol. Nanotechnol., 2, 678-689.
Yang, K.-Y., Yoon, K.-M., Choi, K.-W & Lee, H. (2009). The Direct Nano-patterning of ZnO using Nanoimprint Lithography with ZnO-sol and Thermal Annealing. Microelectron. Eng., 86, 2228-2231.
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2021-09-09
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