Preparation and Characterization of Titanium Chromium Nitride Thin Film Deposited by Reactive DC Magnetron Co-Sputtering Method
Abstract
Titanium Chromium Nitride (TiCrN) thin films were deposited on Si substrate by reactive DC magnetron co-sputtering method in this research to study the effect of N2 gas flow rates on the crystal structure, microstructure, thickness and elemental composition. The films were characterized by XRD, FE-SEM and EDS techniques, respectively. The results showed that TiCrN structure of the films was obtained. The crystal structure of the as–deposited films was varied with N2 gas flow rates. The crystal size and lattice constant were in the range of 11.35 - 22.35 nm and 4.133 – 4.197 Å, respectively. The columnar structure was investigated from the cross-section analysis. Moreover, the microstructure, thickness and elemental compositions of the as-deposited films were stilled changed with the N2 gas flow rates. Keywords : thin film, TiCrN, N2 gas flow rates, reactive co-sputteringReferences
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Wang, L., Zhang, G., Wood, R.J.K., Wang, S.C. and Xue, Q. (2010). Fabrication of CrAlN nanocomposite films with high hardness and excellent anti-wear performance for gear application. Surface and Coatings Technology, 204, 3517-3524.
Witit-Anun, N. and Teekhaboot, A. (2016). Effect of Ti Sputtering Current on Structure of TiCrN Thin Films Prepared by Reactive DC Magnetron Co-Sputtering. Key Engineering Materials, 675-676, 181-184.
Yong, T., Bo, M., Bin, L., Wei, Y, Binhai, Y. and Longsheng, L. (2016). Influences of Sedimentation Time and Target Current Ratio on Wear Resistance of a Magnetron Sputtered TiAlN Coating. Rare Metal Materials and Engineering, 45(12), 3057-3061.
Zhang, S., Sun, D., Fu, Y. and Du, H. (2003). Recent advances of superhard nanocomposite coatings:
a review. Surface and Coatings Technology, 167, 113-119.
Chen, S., Luo, D. and Zhao, G. (2013). Investigation of the properties of TixCr1-xN coatings prepared by cathodic arc deposition. Physics Procedia, 50, 163-168.
Hsu, C.H., Lin, C.K., Huang, K.H. and Ou, K.L. (2013). Improvement on hardness and corrosion resistance of ferritic stainless steel via PVD-(Ti,Cr)N coatings. Surface and Coatings Technology, 231, 380-384.
Lee, D.B., Kim, M.H., Lee, Y.C. and Kwon, S.C. (2001). High temperature oxidation of TiCrN coatings deposited on a steel substrate by ion plating. Surface and Coatings Technology, 141(2-3), 232-239.
Lin, Y.W., Huang, J.H. and Yu, G.P. (2010). Effect of nitrogen flow rate on properties of nanostructured TiZrN thin films produced by radio frequency magnetron. Thin Solid Films, 518(24), 7308-7311.
Paksunchai, C., Denchitcharoen, S. Chaiyakun, S. and Limsuwan, P. (2014). Growth and Characterization of Nanostructured TiCrN Films Prepared by DC Magnetron Co sputtering. Journal of Nanomaterials,
2014, 1-9.
Pang, X., Zhang, L. Yang, H., Gao, K. and Volinsky, A.A. (2016). Residual Stress and Surface Energy of Sputtered TiN Films. Journal of Materials Engineering and Performance, 24(3), 1185-1191.
Safi, I. (2000). Recent aspects concerning DC reactive magnetron sputtering of thin films: a review. Surface and Coatings Technology, 32, 203-219.
Samapisut, S., Tipparach, U., Heness, G. and McCredie, G. (2012). Effect of Magnetron Discharge Power and N2 Flow Rate for Preparation of TiCrN Thin Film. Procedia Engineering, 32, 1135-1138.
Smith, D.L. (1995). Thin-Film Deposition:Principle And Practice. New york: McGrawHill.
Wang, L., Zhang, G., Wood, R.J.K., Wang, S.C. and Xue, Q. (2010). Fabrication of CrAlN nanocomposite films with high hardness and excellent anti-wear performance for gear application. Surface and Coatings Technology, 204, 3517-3524.
Witit-Anun, N. and Teekhaboot, A. (2016). Effect of Ti Sputtering Current on Structure of TiCrN Thin Films Prepared by Reactive DC Magnetron Co-Sputtering. Key Engineering Materials, 675-676, 181-184.
Yong, T., Bo, M., Bin, L., Wei, Y, Binhai, Y. and Longsheng, L. (2016). Influences of Sedimentation Time and Target Current Ratio on Wear Resistance of a Magnetron Sputtered TiAlN Coating. Rare Metal Materials and Engineering, 45(12), 3057-3061.
Zhang, S., Sun, D., Fu, Y. and Du, H. (2003). Recent advances of superhard nanocomposite coatings:
a review. Surface and Coatings Technology, 167, 113-119.
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2018-10-03
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บทความวิจัยจากการประชุมวิชาการระดับชาติ"วิทยาศาสตร์วิจัย"ครั้งที่ 10
