Effect of oxygen partial pressure and annealing temperature on the properties of SnO2 films
Abstract
SnO2 films with different oxygen partial pressure were prepared on glass and Si (100) substrates by d.c. reactive magnetron sputtering with pure Sn. The effect of oxygen partial pressure on the structural properties, opitical preperties and surface morphology were investigated by x-ray diffraction, energy dispersive x-ray (EDX), visible-near IR spectroscopy and atomic force microscopy. The results revealed formation of tetrahedral tin dioxide phase. Optical transparency of film with the average at 80% at visible wavelength was obtained and it had been increased by increasing the oxygen content in deposition process and almost constant at higher oxygen partial pressure. The films were treated with post- annealing under atmospheric pressure at various temperature (400, 600 and 800 C°) for a one hour period. The film structure was stable after annealing. The elemental composition almost unchanged after post-annealing temperature. Our results indicated that sample treated at 600 C°post-annealing temperature had the highest optical band gap and the lowest Urbach enery.References
Aarik, J., Mander, H., Kim, M., & Pung, L.(2004). Optical characterization of HfO2 thin films grown by atomic
layer deposition. Thin solid films, 466, 41-47.
Abdelkrim, A., Rahmance, S., Abdelouahab., O., Abdelmalek, N., & Brahim, C. (2016). Effect of solution
concentration on the structural, optical and electrical properties by spray pyrolysis. Optik-
International journal for light and electron optics, 127, 2653-2658.
Adamik, M., Barna, P.B., Tomov, I., & Biro, D. (1994). Problems of structure evolution in polycrystalline films.
Correlation between grain morphology and texture formatioin mechanism. Physica Status Solid i A ,145, 275-281.
Ahmad, A.A., Alsaad, A.M., Albiss, B.A., Ali Al-Akhras, M., El-Nasser, H.M., & Qattan, I.A.. (2016) Optical and
Structural properties of sputter deposited ZnO thin films in relevance to post-annealing and substrate
temperature. Thin solid films, 606, 133-142.
Aoun, Y., Benhaoua, B., Benramache, S.,& Gasmi, B. (2015). Effect of annealing temperature on structural,
optical and electrical properties of zinc oxide (ZnO) thin film deposited by spray pyrolysis technique. Optik, 126, 5407-5411.
Arienzo, M.D., Armelao, L., Caciamano, A., Mari, C.M., Polizzi, S., Ruffo, R., Scotti,R., Testino, A., Wahba, L., &
Morazzoni, F. (2012). One step preparation of SnO2 and Pt-doped SnO2 as inverse opal thin film for gas sensing. Chemistry of materials. 22, 4089.
Bagherian, S., & Zak. A.K. (2016) . X-ray peak broadening and optical properties analysis of SnO2 nanosheets
prepared by sol-gel method. Materials science in semiconductor processing, 56, 52-58.
Bansal, S., Pandya, D.K., Kashyap, S.C., & Haranath, D. (2014). Growth ambient dependence of defects,
structural disorder and photoluminescence in SnO2 films deposited by reactive magnetron sputtering. Journal of alloys and compounds, 583, 186-190.
Baronetti, G.T., Demiguel, S.R., Scelza, O.A., & Castro, A.A. (1986). State of metallic phase in Pt-Sn/Al2O3
catalysts prepared by different deposition technique. Applied catalysis, 24, 109-116.
Benhaliliba, M., Benouis, C.E., Aida, M.S., Yakuphanoglu, F., & Juarez, A.S. (2010). Indium and aluminium-
doped ZnO thin films deposited onto FTO substrates: nanostructure, optical, photoluminescence and electrical properties. Journal of sol gel science and technology, 55, 335-342.
Bouhdjer, A., Attaf, A., Saidi, H., Bendjedidi, H., Benkhetta, Y., & Boohaf, I. (2015). Correlation between the
structural, morphological, optical and electrical properties of In2O3 thin film obtained by an ultrasonic spray CVD process. Journal of semiconductors,36, 082002-1-082002-6.
Burstein, E. (1954). Anomalous optical absorption limit in InSb. Physical review, 93, 632-633.
Chen, M., Wang, X., Yu, Y.H., Pei, Z.I., Bai, X.D., Sun, C., Huang, R.F.,& Wen, L.S. (2000). X-ray photoscopy
and auger electron spectroscopy studied of Al-doped ZnO films. Applied surface science, 158, 134-140.
Cisneros-Morales, M.C.,& Aita, C.R. (2010). The effect of nanocrystallite size in monoclinic HfO2 films on
lattice expansion and near-edge optical absorption. Applied physics letters, 96, 191904.
Das, S., Kar, S., & Chaudhuri, S. (2006.) Optical properties of SnO2 nanoparticle and nanorods synthesized
by solvothermal process. Journal of applied physics, 99, 114303.
Fang, Z. B., Yan, Z. J., Tan, Y. S., Liu, X. Q. & Wang. Y. Y. (2005) Influence of post-
annealing treatment on the structure properties of ZnO films. Applied Surface Science. 241, 303-308.
Guillen, C.,& Herrero, J. (2008). Transparent and conductive ZnO:Al thin films grown by pulsed magnetron
sputtering in current or voltage regulation modes. Vacuum, 82,668-672.
Huang, M., Hameiri, Z. , Aberle, A.G., & Mueller, T. (2015) Influence of discharge power and annealing
temperature on the properties of indium tin oxide thin films prepared by pulsed-DC magnetron
sputtering. Vacuum, 121,187-193.
Jothibas, M., Manoharam, C., Ramalingam, S., Dhanapandian, S. Johnson Jeyakumar, S., & Bououdina, M.
(2013). Preparation, characterization, spectroscopic (FT-TR, FT-Raman, UV and visible)studies,
optical properties and Kubo gap analysis of In2O3 thin films. Journal of molecular structure, 1049, 239-249.
Kwoka, M., Ottaviana, L., Passacantando, M., Santucci, S., Czempik, G., & Szuber, J. (2005). XPS study of the
surface chemistry of L-CVD SnO2 thin film after oxidation. Thin solid films, 490, 36-42.
Lin, A.W.C., Arsstrong, N.R., & Kuwana, T. (1977). X-ray photoelectron auger electron spectroscopic studies
of tin and indium metal folis and oxides. Analytical chemistry, 49, 1228-1235.
Ling, X., Liu, X., Wang, G., & Fan, Z. (2015). Influene of oxygen partial pressure on laser-induced damage
resistance of ZrO2 films in vacuum. Vacuum, 119, 145-150.
Liu, H., Zhou, P., Zhang, L., Liang, Z., Zhao, H., & Wang, Z. (2016). Effects of oxygen partial pressure on the
structural and optical properties of undoped and Cu-doped ZnO thin films prepared by magnetron
co-sputtering. Materials Letters, 164, 509-512.
Lu, Y.M., Jiang, J., Becker, M., Kramm, B., Chen, L., Polity, A., He, Y.B., Klan, P.J. ,& Meyer, B.K. (2015).
Polycrystalline SnO2 films grown by chemical vapor deposition on quarts glass. Vacuum, 122, 347-
352.
Mallikarjuna Reddy, A., Sivassankar Reddy, A., Lee, K-S., & Sreedhara Reddy, P. (2011). Effect of oxygen
partial pressure on the structural, optical and electrical properties of sputtered NiO films. Ceramics International, 37, 2837-2843.
Manouchehri, I., Gholami, K., Astinchap, B., Mordian, R., & Mehrparvar, D. (2016). Investigation of annealing
effects on optical properties of Ti thin films deposited by RF magnetron sputtering. Optik. 127, 5383-5389.
Mass, J., Bhattachayya, P., & Katiyar, R.S. (2004). Effect of high substrate temperature on Al-doped ZnO thin
films grown by pulsed laser deposition. Materials science and engineering B,103, 9-15.
Naumkin, A.V., Vass, A.K., Gaarenstroom & Powell, C.J. (2012). Nist X-ray photoelectron spectroscopy
database. Retrieved Sep, 2016. From srdata.nist.gov/xps/Default.aspx
Oros, C., Horprathum, M. , Wisitoraat, A., Srichaiyaperk, T.,
Samransuksamer, B., Limwichean, S. , Eiamchai,
P., Phokharathul, D., Nuntawong, N., Chananonnawathorn, C., Patthnasettakul, V., Klamchuen, A.,
Kaewkhao, J. , Tauntranont, A., & Chindaudum, P. (2016). Ultra-sensitive NO2 sensors based on vertically aligned SnO2 nanorods deposited by DC reactive magnetron sputtering with glancing angle deposition technique. Sensors and Actuators B: Chemical, 223, 936-345.
Preib, E.M., Rogge, T., Kraub, A., & Seidel, H. (2015). Gas sensing by SnO2 thin films prepared by large-area
pulsed laser deposition. Procedia engineering, 120, 88-91.
Rivera, R., Marcillo, F., Chamba, A., Puchaicela, P., &
Stashans, A. (2014). Quantum Chemical study of
point defects in Tin Dioxide. Transactions on Engineering Technologies, (pp.13-24):Springer.
Saadeddin, I., Pecquenard, B., Manaud, J.P., Decourt, R., Labrugere, C., Buffeteau, T.,& Campet, G. (2007).
Synthesis and characterization of single-and co-doped SnO2 thin films for optoelectronic applications. Applied surface science, 253, 5240-5249.
Thomas, B., & Skariah, B. (2015). Spray depsited Mg-doped SnO2 thin film LPG sensors: XPS and EDX
analysis in relation to deposition temperature and doping. Journal of alloys and compounds. 625, 231-240.
Ullah, H., Khan, I., Yamani, Z.H., & Qurashi, A. (2017). Sonochemical-driven ultrafast facile synthesis of SnO2
nanoparticles: Growth mechanism structural electrical and hydroden gas sensing properties.
Ultrasonics Sonochemistry 34, 484-490.
Wei, Y., Chen, C., Yuan, G., & Gao, S. (2016) SnO2 nanocrystals with abundant oxygen vacancies:
Preparation and room temperature No2 sensing. Journal of Alloys and Compounds, 681, 43-49.
Wu, W.F., & Chiou, B.S. (1994). Properties of radio-frequency magnetron sputtered ITO films without in-situ
substrate heating and post-deposition anneal. Thin solid films, 247, 201-207.
Wu, W.F.,& Chiou, B.S. (1996). Effect of oxygen concentration in the sputtering ambient on the microstructure,
electrical and optical properties of radio-frequency magnetron-sputtered indium tin oxide film. Semiconductor science technology. 11, 196-202.
Xiong, K., & Robertson, J. (2005). Point defects in HfO2 high k gate oxide. Microelectronic Engineering, 80,
408-411.
Xu, B., Ren, X-G, Gu, G-R, Lann, L-L, & Wu, B-J. (2016). Structural and optical properties of Zn-doped SnO2
films prepared by DC and RF magnetron co-sputtering. Superlattices and Microstructures, 89, 34-42.
Yen, W.T. (2010). Effect of post-annealing on the optoelectronic properties of ZnO:Ga films prepared by
pusled derect current magnetron sputtering. Thin solid film, 518, 3882-3885.
Zheng, Y.B., Wang, S.J., Huan, A.C.H., Tan, C.Y., Yan, L., & Ong. C.K. (2005). Al2O3 incorporation effect on
the band structure of Ba0.5Sr0.5TiO3. Applied Physics Letters, 86, 112910.
layer deposition. Thin solid films, 466, 41-47.
Abdelkrim, A., Rahmance, S., Abdelouahab., O., Abdelmalek, N., & Brahim, C. (2016). Effect of solution
concentration on the structural, optical and electrical properties by spray pyrolysis. Optik-
International journal for light and electron optics, 127, 2653-2658.
Adamik, M., Barna, P.B., Tomov, I., & Biro, D. (1994). Problems of structure evolution in polycrystalline films.
Correlation between grain morphology and texture formatioin mechanism. Physica Status Solid i A ,145, 275-281.
Ahmad, A.A., Alsaad, A.M., Albiss, B.A., Ali Al-Akhras, M., El-Nasser, H.M., & Qattan, I.A.. (2016) Optical and
Structural properties of sputter deposited ZnO thin films in relevance to post-annealing and substrate
temperature. Thin solid films, 606, 133-142.
Aoun, Y., Benhaoua, B., Benramache, S.,& Gasmi, B. (2015). Effect of annealing temperature on structural,
optical and electrical properties of zinc oxide (ZnO) thin film deposited by spray pyrolysis technique. Optik, 126, 5407-5411.
Arienzo, M.D., Armelao, L., Caciamano, A., Mari, C.M., Polizzi, S., Ruffo, R., Scotti,R., Testino, A., Wahba, L., &
Morazzoni, F. (2012). One step preparation of SnO2 and Pt-doped SnO2 as inverse opal thin film for gas sensing. Chemistry of materials. 22, 4089.
Bagherian, S., & Zak. A.K. (2016) . X-ray peak broadening and optical properties analysis of SnO2 nanosheets
prepared by sol-gel method. Materials science in semiconductor processing, 56, 52-58.
Bansal, S., Pandya, D.K., Kashyap, S.C., & Haranath, D. (2014). Growth ambient dependence of defects,
structural disorder and photoluminescence in SnO2 films deposited by reactive magnetron sputtering. Journal of alloys and compounds, 583, 186-190.
Baronetti, G.T., Demiguel, S.R., Scelza, O.A., & Castro, A.A. (1986). State of metallic phase in Pt-Sn/Al2O3
catalysts prepared by different deposition technique. Applied catalysis, 24, 109-116.
Benhaliliba, M., Benouis, C.E., Aida, M.S., Yakuphanoglu, F., & Juarez, A.S. (2010). Indium and aluminium-
doped ZnO thin films deposited onto FTO substrates: nanostructure, optical, photoluminescence and electrical properties. Journal of sol gel science and technology, 55, 335-342.
Bouhdjer, A., Attaf, A., Saidi, H., Bendjedidi, H., Benkhetta, Y., & Boohaf, I. (2015). Correlation between the
structural, morphological, optical and electrical properties of In2O3 thin film obtained by an ultrasonic spray CVD process. Journal of semiconductors,36, 082002-1-082002-6.
Burstein, E. (1954). Anomalous optical absorption limit in InSb. Physical review, 93, 632-633.
Chen, M., Wang, X., Yu, Y.H., Pei, Z.I., Bai, X.D., Sun, C., Huang, R.F.,& Wen, L.S. (2000). X-ray photoscopy
and auger electron spectroscopy studied of Al-doped ZnO films. Applied surface science, 158, 134-140.
Cisneros-Morales, M.C.,& Aita, C.R. (2010). The effect of nanocrystallite size in monoclinic HfO2 films on
lattice expansion and near-edge optical absorption. Applied physics letters, 96, 191904.
Das, S., Kar, S., & Chaudhuri, S. (2006.) Optical properties of SnO2 nanoparticle and nanorods synthesized
by solvothermal process. Journal of applied physics, 99, 114303.
Fang, Z. B., Yan, Z. J., Tan, Y. S., Liu, X. Q. & Wang. Y. Y. (2005) Influence of post-
annealing treatment on the structure properties of ZnO films. Applied Surface Science. 241, 303-308.
Guillen, C.,& Herrero, J. (2008). Transparent and conductive ZnO:Al thin films grown by pulsed magnetron
sputtering in current or voltage regulation modes. Vacuum, 82,668-672.
Huang, M., Hameiri, Z. , Aberle, A.G., & Mueller, T. (2015) Influence of discharge power and annealing
temperature on the properties of indium tin oxide thin films prepared by pulsed-DC magnetron
sputtering. Vacuum, 121,187-193.
Jothibas, M., Manoharam, C., Ramalingam, S., Dhanapandian, S. Johnson Jeyakumar, S., & Bououdina, M.
(2013). Preparation, characterization, spectroscopic (FT-TR, FT-Raman, UV and visible)studies,
optical properties and Kubo gap analysis of In2O3 thin films. Journal of molecular structure, 1049, 239-249.
Kwoka, M., Ottaviana, L., Passacantando, M., Santucci, S., Czempik, G., & Szuber, J. (2005). XPS study of the
surface chemistry of L-CVD SnO2 thin film after oxidation. Thin solid films, 490, 36-42.
Lin, A.W.C., Arsstrong, N.R., & Kuwana, T. (1977). X-ray photoelectron auger electron spectroscopic studies
of tin and indium metal folis and oxides. Analytical chemistry, 49, 1228-1235.
Ling, X., Liu, X., Wang, G., & Fan, Z. (2015). Influene of oxygen partial pressure on laser-induced damage
resistance of ZrO2 films in vacuum. Vacuum, 119, 145-150.
Liu, H., Zhou, P., Zhang, L., Liang, Z., Zhao, H., & Wang, Z. (2016). Effects of oxygen partial pressure on the
structural and optical properties of undoped and Cu-doped ZnO thin films prepared by magnetron
co-sputtering. Materials Letters, 164, 509-512.
Lu, Y.M., Jiang, J., Becker, M., Kramm, B., Chen, L., Polity, A., He, Y.B., Klan, P.J. ,& Meyer, B.K. (2015).
Polycrystalline SnO2 films grown by chemical vapor deposition on quarts glass. Vacuum, 122, 347-
352.
Mallikarjuna Reddy, A., Sivassankar Reddy, A., Lee, K-S., & Sreedhara Reddy, P. (2011). Effect of oxygen
partial pressure on the structural, optical and electrical properties of sputtered NiO films. Ceramics International, 37, 2837-2843.
Manouchehri, I., Gholami, K., Astinchap, B., Mordian, R., & Mehrparvar, D. (2016). Investigation of annealing
effects on optical properties of Ti thin films deposited by RF magnetron sputtering. Optik. 127, 5383-5389.
Mass, J., Bhattachayya, P., & Katiyar, R.S. (2004). Effect of high substrate temperature on Al-doped ZnO thin
films grown by pulsed laser deposition. Materials science and engineering B,103, 9-15.
Naumkin, A.V., Vass, A.K., Gaarenstroom & Powell, C.J. (2012). Nist X-ray photoelectron spectroscopy
database. Retrieved Sep, 2016. From srdata.nist.gov/xps/Default.aspx
Oros, C., Horprathum, M. , Wisitoraat, A., Srichaiyaperk, T.,
Samransuksamer, B., Limwichean, S. , Eiamchai,
P., Phokharathul, D., Nuntawong, N., Chananonnawathorn, C., Patthnasettakul, V., Klamchuen, A.,
Kaewkhao, J. , Tauntranont, A., & Chindaudum, P. (2016). Ultra-sensitive NO2 sensors based on vertically aligned SnO2 nanorods deposited by DC reactive magnetron sputtering with glancing angle deposition technique. Sensors and Actuators B: Chemical, 223, 936-345.
Preib, E.M., Rogge, T., Kraub, A., & Seidel, H. (2015). Gas sensing by SnO2 thin films prepared by large-area
pulsed laser deposition. Procedia engineering, 120, 88-91.
Rivera, R., Marcillo, F., Chamba, A., Puchaicela, P., &
Stashans, A. (2014). Quantum Chemical study of
point defects in Tin Dioxide. Transactions on Engineering Technologies, (pp.13-24):Springer.
Saadeddin, I., Pecquenard, B., Manaud, J.P., Decourt, R., Labrugere, C., Buffeteau, T.,& Campet, G. (2007).
Synthesis and characterization of single-and co-doped SnO2 thin films for optoelectronic applications. Applied surface science, 253, 5240-5249.
Thomas, B., & Skariah, B. (2015). Spray depsited Mg-doped SnO2 thin film LPG sensors: XPS and EDX
analysis in relation to deposition temperature and doping. Journal of alloys and compounds. 625, 231-240.
Ullah, H., Khan, I., Yamani, Z.H., & Qurashi, A. (2017). Sonochemical-driven ultrafast facile synthesis of SnO2
nanoparticles: Growth mechanism structural electrical and hydroden gas sensing properties.
Ultrasonics Sonochemistry 34, 484-490.
Wei, Y., Chen, C., Yuan, G., & Gao, S. (2016) SnO2 nanocrystals with abundant oxygen vacancies:
Preparation and room temperature No2 sensing. Journal of Alloys and Compounds, 681, 43-49.
Wu, W.F., & Chiou, B.S. (1994). Properties of radio-frequency magnetron sputtered ITO films without in-situ
substrate heating and post-deposition anneal. Thin solid films, 247, 201-207.
Wu, W.F.,& Chiou, B.S. (1996). Effect of oxygen concentration in the sputtering ambient on the microstructure,
electrical and optical properties of radio-frequency magnetron-sputtered indium tin oxide film. Semiconductor science technology. 11, 196-202.
Xiong, K., & Robertson, J. (2005). Point defects in HfO2 high k gate oxide. Microelectronic Engineering, 80,
408-411.
Xu, B., Ren, X-G, Gu, G-R, Lann, L-L, & Wu, B-J. (2016). Structural and optical properties of Zn-doped SnO2
films prepared by DC and RF magnetron co-sputtering. Superlattices and Microstructures, 89, 34-42.
Yen, W.T. (2010). Effect of post-annealing on the optoelectronic properties of ZnO:Ga films prepared by
pusled derect current magnetron sputtering. Thin solid film, 518, 3882-3885.
Zheng, Y.B., Wang, S.J., Huan, A.C.H., Tan, C.Y., Yan, L., & Ong. C.K. (2005). Al2O3 incorporation effect on
the band structure of Ba0.5Sr0.5TiO3. Applied Physics Letters, 86, 112910.
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